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Piezoresistive silicon thin film sensor array for biomedical ...

    https://www.sciencedirect.com/science/article/pii/S0040609011003658
    Piezoresistive silicon thin film sensor array for biomedical applications 1. Introduction. Since the piezoresistive property of silicon was first reported by C. …

Piezoresistive silicon thin film sensor array for biomedical ...

    https://www.sciencedirect.com/science/article/abs/pii/S0040609011003658
    Inclined (zigzag grown) thin films were prepared with increasing amounts of Cu and characterized in terms of the most relevant properties for sensing applications. …

Piezoresistive silicon thin film sensor array for biomedical …

    https://www.semanticscholar.org/paper/Piezoresistive-silicon-thin-film-sensor-array-for-Alpuim-Correia/e5a10c102d8ec15b17816db6b1016f5632f386b3
    The piezoresistive behavior of optimized n-type and p-type microcrystalline silicon films deposited on polyethylene terephthalate plastic substrate by hot-wire and …

Piezoresistive silicon thin film sensor array for biomedical ...

    https://www.researchgate.net/publication/251501190_Piezoresistive_silicon_thin_film_sensor_array_for_biomedical_applications
    N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire …

Theory, technology and applications of piezoresistive …

    https://www.sciencedirect.com/science/article/pii/S0924424718308434
    Metallic thin–film sensors using gold as the piezoresistive material are commonly used for measuring the tactile sensitivity and forces exerted during the …

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    https://repositorium.sdum.uminho.pt/bitstream/1822/11847/1/HW6-19_rev.pdf
    Test structures, consisting of microresistors having lateral dimensions in the range from 50 to 100 µm and thickness of 120 nm were defined in an array by reactive ion etching. …

Silicon-Based Sensors for Biomedical …

    https://www.mdpi.com/1424-8220/19/13/2908
    The silicon sensors have been implemented in a wide range of applications: ranging from personalised use like healthcare to industrial uses. Among all the …

Silicon-Based Sensors for Biomedical Applications: A …

    https://pubmed.ncbi.nlm.nih.gov/31266148/
    The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. …

Piezoresistive silicon thin film sensor array for biomedical …

    https://www.academia.edu/67509146/Piezoresistive_silicon_thin_film_sensor_array_for_biomedical_applications
    Piezoresistive silicon thin film sensor array for biomedical applications (PDF) Piezoresistive silicon thin film sensor array for biomedical applications | Isabel …

Development of highly-sensitive and ultra-thin silicon …

    https://www.sciencedirect.com/science/article/pii/S0924424714002611
    This paper reports the development of a highly-sensitive and ultra-thin silicon stress sensor chip (UTSC) and its applications for wearable sensors. Stress sensor …



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