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Piezoresistive silicon thin film sensor array for biomedical ...
- https://www.sciencedirect.com/science/article/pii/S0040609011003658
- Piezoresistive silicon thin film sensor array for biomedical applications 1. Introduction. Since the piezoresistive property of silicon was first reported by C. …
Piezoresistive silicon thin film sensor array for biomedical ...
- https://www.sciencedirect.com/science/article/abs/pii/S0040609011003658
- Inclined (zigzag grown) thin films were prepared with increasing amounts of Cu and characterized in terms of the most relevant properties for sensing applications. …
Piezoresistive silicon thin film sensor array for biomedical …
- https://www.semanticscholar.org/paper/Piezoresistive-silicon-thin-film-sensor-array-for-Alpuim-Correia/e5a10c102d8ec15b17816db6b1016f5632f386b3
- The piezoresistive behavior of optimized n-type and p-type microcrystalline silicon films deposited on polyethylene terephthalate plastic substrate by hot-wire and …
Piezoresistive silicon thin film sensor array for biomedical ...
- https://www.researchgate.net/publication/251501190_Piezoresistive_silicon_thin_film_sensor_array_for_biomedical_applications
- N-type hydrogenated nanocrystalline silicon thin film piezoresistors, with gauge factor −28, were deposited on rugged and flexible polyimide foils by Hot-wire …
Theory, technology and applications of piezoresistive …
- https://www.sciencedirect.com/science/article/pii/S0924424718308434
- Metallic thin–film sensors using gold as the piezoresistive material are commonly used for measuring the tactile sensitivity and forces exerted during the …
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- https://repositorium.sdum.uminho.pt/bitstream/1822/11847/1/HW6-19_rev.pdf
- Test structures, consisting of microresistors having lateral dimensions in the range from 50 to 100 µm and thickness of 120 nm were defined in an array by reactive ion etching. …
Silicon-Based Sensors for Biomedical …
- https://www.mdpi.com/1424-8220/19/13/2908
- The silicon sensors have been implemented in a wide range of applications: ranging from personalised use like healthcare to industrial uses. Among all the …
Silicon-Based Sensors for Biomedical Applications: A …
- https://pubmed.ncbi.nlm.nih.gov/31266148/
- The paper emphasises the use of silicon, in different forms, to fabricate electrodes and substrates for the sensors that are to be used for biomedical sensing. …
Piezoresistive silicon thin film sensor array for biomedical …
- https://www.academia.edu/67509146/Piezoresistive_silicon_thin_film_sensor_array_for_biomedical_applications
- Piezoresistive silicon thin film sensor array for biomedical applications (PDF) Piezoresistive silicon thin film sensor array for biomedical applications | Isabel …
Development of highly-sensitive and ultra-thin silicon …
- https://www.sciencedirect.com/science/article/pii/S0924424714002611
- This paper reports the development of a highly-sensitive and ultra-thin silicon stress sensor chip (UTSC) and its applications for wearable sensors. Stress sensor …
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