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Simulation of MEMS Piezoelectric Micropump for …
- https://www.techbriefs.com/component/content/article/tb/pub/briefs/bio-medical/491
- The micropump measured 6000 x 6000 x 1000 μm for the length, width, and height, respectively, and its housing was composed of silicon nitride (Si3N4). The pump was driven by a multi-layer lead zirconate titanate (PZT) piezoelectric component bonded to a moving diaphragm that was 10 μm thick, which in turn forced fluid through a small chamber.
Simulation of MEMS Piezoelectric Micropump for …
- https://asmedigitalcollection.asme.org/IMECE/proceedings/IMECE2002/36509/187/312664
- In this study, we demonstrate the usefulness of Finite Element Analysis (FEA) and simulation techniques in the design of MEMS micropumps. Such pumps provide for …
Analysis of PDMS based MEMS device for drug …
- https://link.springer.com/article/10.1007/s00542-020-05032-z
- This is paper briefly explains the MEMS based piezoelectrically actuated micropump and its applications for the …
Micropumps and biomedical applications – A review
- https://www.sciencedirect.com/science/article/pii/S0167931718301527
- The most common mechanical micropumps include piezoelectric (PZT), electrostatic, electroactive polymer composite, thermo-pneumatic, shape memory alloy, …
Design and optimization of MEMS based piezoelectric
- https://link.springer.com/article/10.1007/s00542-019-04712-9
- The micropump is the trending device for medical applications in MEMS technology. The actuator in micropump have got more significance for it invokes the …
Simulation of MEMS Piezoelectric Micropump for …
- https://www.researchgate.net/publication/267584091_Simulation_of_MEMS_Piezoelectric_Micropump_for_Biomedical_Applications
- Request PDF | Simulation of MEMS Piezoelectric Micropump for Biomedical Applications | In this study, we demonstrate the usefulness of Finite …
Advances in MEMS micropumps and their emerging …
- https://www.sciencedirect.com/science/article/pii/B9780128200438000025
- MEMS technologies successfully used to the requirements of biotechnology and to design of different micropump types ideas, manufacturing, various instruments and …
MEMS-Based Drug Delivery Device With Integrated …
- https://asmedigitalcollection.asme.org/biomechanical/article/143/8/081010/1106232/A-MEMS-Based-Drug-Delivery-Device-With-Integrated
- In this study, we address various aspects of design and simulation of a MEMS-based piezoelectric insulin micropump including polydimethylsiloxane …
(PDF) Design, Simulation and Study of …
- https://www.researchgate.net/publication/272943998_Design_Simulation_and_Study_of_MEMS_Based_Micro-needles_and_Micro-pump_for_Biomedical_Applications
- Here, we performed systematic measurements of in vivo brain insertion forces and tissue compression for microscale probes of different diameters (7.5-100 µm cylindrical microwires and …
Review on MEMS based micropumps for biomedical …
- https://www.semanticscholar.org/paper/Review-on-MEMS-based-micropumps-for-biomedical-Munas-Amarasinghe/fb2e092c113f3307a1732a17e87d2f90835275b9
- In this paper, the development of MEMS based micropumps for biomedical applications has been addressed. The objective of this paper is to present the major …
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